| 气 体 | 规 格 | 杂 质 含 量（ppm) |
| CO2 | 99.9995％ | N2≦1.5 O2≦1.0 H20≦1.5 总烃≦1.0 |
| 99.999％ | N2≦4.0 O2≦2.0 H20≦3.0 总烃≦1.0 |
| 99.995 ％ | N2≦20.0 O2≦8.0 H20≦8.0 总烃≦2.0 |
| 99.95 ％ | N2≦280. O2≦60. H20≦20. 总烃≦10. |
| He | 99.999～99.9996％ | H2≦0. O2+Ar≦2 N2≦5 CO2≦0.5 CH4≦0.5 Ne≦0.5 CO2≦0.5 CO≦0.5 H2<3 |
| 99.99～99.995％ | Ne<1.0 CO<1.0 CH4<1.0 CO2<1.0 O2+Ar<10 H2O<10 |
| Ar | 99.999％ | N2≤5.0 O2≤2.0 H2≤1.0 CH4≤2.0 H2O≤4.0 |
| N2 | 99．999％ | O2≤3.0 H2≤1.0 CH4≤3.0 H2O≤5.0 |
| H2 | 99．999％ | N2≤5.0 O2<2.0 H2O<2.0 |
| O2 | 99.995％ | Ar<10.0 N2<20.0 H2O≤3.0 CO+CO2+CH4≤3.0 |
| 99.999％ | Ar≤2.0 N2≤5.0 H2O≤2.0 CO+CO2+CH4≤1.0 |
| CH4 | 99.995％ | O2 (Ar)≤5.0 N2≤15.0 H2≤5.0 C2H6≤15.0 H2O≤5.0 |
| 99.99％ | O2(Ar)≤10.0 N2≤35.0 H2≤10.0 C2H6≤25.0 H2O≤15.0 |
| 99.9％ | O2(Ar)≤50.0 N2≤250.0 H2≤ 50.0 C2H6≤500.0 H2O≤50.0 |
| CO | 99.95％ | O2≤150.0 N2≤300.0 H2O≤20.0 |
| 99.9％ | O2≤300.0 N2≤600.0 H2O≤50.0 |
| NH3 | 99.999％ | O2≤2.0 N2≤5.0 CO+CO2+CH4≤2.0 H2O≤5.0 总杂质含量≤10.0 |
| Ne | 99.999％ | N2<2.0 CO<0.05 He<6.0 H2O<1.0 O2+Ar<1.0 CH4<1.0 CO2<0.5 H2<1.0 |