Measurement |
Frequency Resolution | 0.001 HZ @ 6 MHz (1 sampleper second) |
Sample Rate | 100 Hz - 10 Hz (10 ms - 100 ms) |
Display Update Rate | 10 Hz - 1 Hz (10 ms - 100 ms) |
Sensor Crystal Frequency | 6 MHz |
Communications |
RS-232 Communication Compatibility | Yes |
RS-232 Baud Rate | 115200 Baud |
Communications Protocol | RS-232 standard (See “RS232 Commands” in the Eon-ID manual) |
Software |
Thickness | Auto ranging: -999 to 9999.9 kÅ |
Rate | Auto ranging -999 to 9999.9 Å |
Power | 00.00 to 100% |
Crystal Health | 00 to 100% |
Number of Processes | 100,000 |
Number of Layers | 100,000 |
Manual Power Control | Yes |
User Labeled Process (full touchscreen with alphanumeric entry) | Yes |
User Labeled Films (full touchscreen withalphanumeric entry) | Yes |
Shutter Delay | Yes |
Software Control Loops | PID |
Data Logging | Yes |
User Language | English |
Electronics |
Temperature | 2x TC Type K |
Relay Output Setup | Outputs can be triggered according to user-defined conditions |
Source Power Supply Signal | 0-5v DC source controls (2) |
Sensor Head Input(s) | High resolution inputs, accurate up to 0 .001 Hz (2) BNC |
Thermocouple Input(s) | Type K thermocouple inputs; accurate to +/-0.25°C (2) |
Display with Graphics | 7” LCD-TFT display graphics; 800 x 480 VGA resolution;resistive touch (touchscreen) |
DB37 Relays*9 Relays | 6 SPST (programmable) | 2 SPDT (programmable) | 1 SPST (abort only) Inputs8 Inputs | Passive Type | Digital | 5V *Max 2A@30VDC |
DB9Relays* 2 Relays | 2 SPST (programmable) *Max 2A@30VDC |
Dimensions |
Eon-ID™ Controller | 10” L X 8.25” W X 5.25” H |
Rackmount Dimension | Standard 19” 3U high rack; 1 or 2 Eon-IDs per slot |
Power Supply |
24 volt power (supplied) |
Ordering Information |
Eon-ID™ | Thin film monitor/controller with integrated touchscreen and temperature measurement |