SJ 2797-1987 Electronic Grade Argon

　　This standard applies to electronic grade argon used in the production process of semiconductor materials, discrete devices, and integrated circuits. Electronic grade argon is divided into two levels according to its usage requirements, with the code being: Electronic Grade I Argon and the code being DZAr - I; Grade II argon code: DZAr - II

　　Name: Filler Column

　　Material: Stainless steel

　　Fixed phase: polymer spheres

　　Specification: 2m * 3mm

　　Model: GDX-104

　　Particle size: 60-80 mesh

　　Application: Agilent 689078207890886088890; Thermo Fisher 1310, Shimadzu GC-2014, GC-2010, GC-2030, Thermo Fisher 1310, Brooke, PE, Panno, Tianrui, Tianmei, Fuli, Chuanyi, Beifen Ruili, Lunan Ruihong

　　Separation: Trace methane content in electronic grade argon

　　SJ 2797-1987电子级氩

　　本标准适用于半导体材料、分立器件和集成电路生产工艺过程中使用的电子级氩、按其使用要求电子级氩分为两级，代号为:电子 Ⅰ级氩代号为:DZAr-Ⅰ ; Ⅱ级氩代号为:DZAr- Ⅱ

　　名称:填充柱

　　材质:不锈钢管

　　固定相:高分子微球

　　规格:2m*3mm*4mm

　　型号:GDX-104

　　粒度:60-80目

　　应用:安捷伦6890,7820,7890,8860,8890；赛默飞1310，岛津GC-2014，GC-2010，GC-2030，赛默飞1310，布鲁克，PE，磐诺，天瑞，天美，福立，川仪，北分瑞利，鲁南瑞虹

　　分离:电子级氩中痕量的甲烷的含量