本标准适用于半导体材料、分立器件和集成电路生产工艺过程中使用的电子级氩、按其使用要求电子级氩分为两级，代号为:电子 Ⅰ级氩代号为:DZAr-Ⅰ ; Ⅱ级氩代号为:DZAr- Ⅱ

　　SJ 2797-1987电子级氩

　　名称:色谱柱

　　规格:内径4mm，长度1m，

　　型号:5A分子筛柱

　　粒度:80-100目

　　*高使用温度:320°C

　　适用于；安捷伦6890；7820,7890,8860,8890；岛津GC14C，GC-2010，GC-2014，GC-2030，布鲁克，PE，瓦里安，磐诺，福立，华爱，天瑞，天美，川仪，东西电子，北分瑞利

　　分离:氢，氧，氮，一氧化碳，甲烷，永jiu气体

　　This standard applies to electronic grade argon used in the production process of semiconductor materials, discrete devices, and integrated circuits. Electronic grade argon is divided into two levels according to its usage requirements, with the code being: Electronic Grade I Argon and the code being DZAr - I; Grade II argon code: DZAr - II

　　SJ 2797-1987 Electronic Grade Argon

　　Name: Chromatographic Column

　　Specification: Inner diameter 4mm, length 1m,

　　Model: 5A molecular sieve column

　　Particle size: 80-100 mesh

　　*High operating temperature: 320 ° C

　　Applicable to; Agilent 6890; 7820,7890,8860,8890； Shimadzu GC14C, GC-2010, GC-2014, GC-2030, Brooke, PE, Varian, Panno, Fuli, Huaai, Tianrui, Tianmei, Chuanyi, Dongxi Electronics, Beifen Ruili

　　Separation: Hydrogen, Oxygen, Nitrogen, Carbon Monoxide, Methane, Permanent Gas