This standard specifies the analysis methods for the composition of tail gas from polycrystalline silicon reduction furnaces and hydrogenation furnaces.

　　This standard is applicable to the determination of exhaust gas components (hydrogen, hydrogen chloride, trichlorosilane, dichlorosilane, and tetrachlorosilane) from improved Siemens process reduction furnaces and hydrogenation furnaces. The detection range of this standard is from 0.1% to 100% volume fraction.

　　Chromatographic column:

　　1-2 meters long, with an inner diameter of 5mm, filled with siliconized material

　　Applications: Agilent, Shimadzu, Thermo Fisher, Varian, Brooke, PE, Panno, Dongxi Electronics, Beifen Ruili, Fuli, Kechuang, Huaai, Chuanyi, Tianmei, Tianrui

　　YS_T 983-2024 "Determination of Exhaust Gas Composition of Silicon Polycrystalline Reduction Furnace by Gas Chromatography Method"

　　本标准规定了多晶硅还原炉和氢化炉尾气成分的分析方法。

　　本标准适用于改良西门子法工艺还原炉和氢化炉尾气成分（氢气、氯化氢、三氯氢硅、二氯二氢硅和四氯化硅）的测定。本标准的检测范围为体积分数0.1%～100%。

　　色谱柱:

　　长1-2米，内径5mm，内填硅烷化材料

　　应用:安捷伦，岛津，赛默飞，瓦里安，布鲁克，PE，磐诺，东西电子，北分瑞利，福立，科创，华爱，川仪，天美，天瑞

　　​YS_T 983-2024《硅多晶还原炉尾气成分的测定 气相色谱法》