硅烷法生产多晶硅具有分解温度低、能耗低、成本低、无污染等优点,被越来越多的多晶硅生产企业关注和应用。

　　本标准规定了硅烷法生产多晶硅尾气中硅烷含量的气相色谱测定方法。

　　本标准适用于硅烷法生产多晶硅尾气中硅烷含量的测定。测定范围为0.050%～10.00%。

　　浩瀚色谱（山东）应用技术开发有限公司，采用HH-GJW多孔微球测定多晶硅生产尾气中硅烷含量，面积外标法定量，结果满意。

　　名称:填充柱

　　规格:2m*Φ3mm

　　型号:HH-GJW多孔微球

　　*高使用温度:240°C

　　适用于:安捷伦6890,7820,7890,8860,8890；赛默飞1310系列，岛津GC2014，PE，布鲁克，瓦里安，磐诺，福立，天瑞，天美，科创，东西电子，北分瑞利

　　标准:YS/T 1290-2018多晶硅生产尾气中硅烷含量的测定 气相色谱法

　　The production of polycrystalline silicon by silane method has the advantages of low decomposition temperature, low energy consumption, low cost, and no pollution, and has been increasingly concerned and applied by polycrystalline silicon production enterprises.

　　This standard specifies the gas chromatography method for determining the silane content in the tail gas of polycrystalline silicon produced by silane method.

　　This standard is applicable to the determination of silane content in the tail gas of polycrystalline silicon produced by silane method. The measurement range is 0.050% to 10.00%.

　　Haohan Chromatography (Shandong) Application Technology Development Co., Ltd. used HH-GJW porous microspheres to determine the silane content in the tail gas of polycrystalline silicon production. The area external standard method was used for quantification, and the results were satisfactory.

　　Name: Filler Column

　　Specification: 2m * Φ 3mm

　　Model: HH-GJW porous microspheres

　　*High operating temperature: 240 ° C

　　Applicable to: Agilent 689078207890886088890; Thermo Fisher 1310 series, Shimadzu GC2014, PE, Bruker, Varian, Panno, Fuli, Tianrui, Tianmei, Kechuang, Dongxi Electronics, Beifen Ruili

　　Standard: YS/T 1290-2018 Determination of Silane Content in Tail Gas of Polycrystalline Silicon Production Gas Chromatography Method