浩瀚色谱（山东）应用技术开发有限公司，采用DC550填充柱气相色谱FPD检测器测定磷化氢含量.实验结果表明,在0 ～ 400μg/L浓度范围内磷的线性关系良好(r=0.999),方法检出限为0.045μg/L.该方法操作快速简便,可应用于多晶硅生产尾气回收氢中微量磷化氢的测定.

　　名称:17.5%DC-550不锈钢填充柱

　　规格:3m*1/8

　　*高使用温度:240°C

　　货号:20240926001

　　适用于:岛津GC-14C，GC-2010，GC-2014，GC-2030

　　标准:T/CNIA 0060-2020 多晶硅用氢气中磷化氢含量的测定 气相色谱法

　　本标准规定了多晶硅用氢气中磷化氢含量的气相色谱测定方法。

　　本标准适用于多晶硅用氢气中磷化氢含量的测定，测定范围为0.02×10-9～1×10-5(v/v)。

　　Haohan Chromatography (Shandong) Application Technology Development Co., Ltd. used DC550 packed column gas chromatography FPD detector to determine the content of phosphine. The experimental results showed that the linear relationship of phosphorus was good (r=0.999) in the concentration range of 0-400 μ g/L, and the detection limit of the method was 0.045 μ g/L. This method is fast and easy to operate, and can be applied to the determination of trace phosphine in hydrogen recovery from tail gas of polycrystalline silicon production

　　Name: 17.5% DC-550 Stainless Steel Filled Column

　　Specification: 3m * 1/8

　　*High operating temperature: 240 ° C

　　Article number: 20240926001

　　Applicable to: Shimadzu GC-14C, GC-2010，GC-2014，GC-2030

　　Standard: T/CNIA 0060-2020 Determination of Phosphine Content in Hydrogen for Polycrystalline Silicon by Gas Chromatography

　　This standard specifies the gas chromatography method for determining the phosphine content in hydrogen gas used for polycrystalline silicon.

　　This standard is applicable to the determination of phosphine content in hydrogen gas for polycrystalline silicon, with a measurement range of 0.02 × 10-9 to 1 × 10-5 (v/v).