This standard specifies the gas chromatography method for determining the content of hydrogen chloride, nitrogen, oxygen, and total carbon in recycled hydrogen gas for polycrystalline silicon. This standard is applicable to the determination of hydrogen chloride, nitrogen, oxygen, and total carbon content in recycled hydrogen for polycrystalline silicon, with a measurement range of (0-10000) × 10-6

　　1. Name: Methane Conversion Column

　　Packing: Nickel catalyst, 0.2mm

　　Specification: 25cm * 3mm

　　Model: HH Ni column

　　two

　　Name: 13X Molecular Sieve Stainless Steel Filled Column

　　Specification: 40CM * 2MM

　　*High operating temperature: 300 ° C

　　3. Name: 5A Molecular Sieve Stainless Steel Filled Column

　　Specification: 2m * 3.175 (1/8)

　　*High operating temperature: 300 ° C

　　Number: 20241015005

　　four

　　Name: Capillary Column

　　Fixed Liquid: Dimethyl Polysiloxane

　　Specification: 30m * 0.53mm * 1.5um

　　Model: HH-1

　　five

　　Name: Stainless Steel Filled Column

　　Fixed liquid: 20% dimethyl polysiloxane

　　Carrier: Chromosorb W AW DMCS80-100 mesh

　　Model: OV-101

　　Application: Gas Chromatography Determination of Hydrogen Chloride, Nitrogen, Oxygen, and Total Carbon Content in Recycled Hydrogen for Polycrystalline Silicon (T/CNIA 0016-2019)

　　Suitable for Agilent, Shimadzu, Thermo Fisher, Varian, Brooke, PE, Panno, Dongxi Electronics, Beifen Ruili, Kechuang, Tianrui, Tianmei, Fuli

　　1.名称:甲烷转化柱

　　填料:镍催化剂，0.2mm

　　规格:25cm*3mm

　　型号:HH-Nicolumn

　　2.

　　名称:13X分子筛不锈钢填充柱

　　规格:40CM*2MM

　　*高使用温度:300°C

　　3.名称:5A分子筛不锈钢填充柱

　　规格:2m*3.175（1/8）

　　*高使用温度:300°C

　　编号:20241015005

　　4.

　　名称:毛细管柱

　　固定液:二甲基聚硅氧烷

　　规格:30m*0.53mm*1.5um

　　型号:HH-1

　　5.

　　名称:不锈钢填充柱

　　固定液:20%二甲基聚硅氧烷

　　担体:Chromosorb W AW DMCS80-100mesh

　　型号:OV-101

　　应用:T/CNIA 0016-2019多晶硅用回收氢气中氯化氢,氮气,氧气,总碳含量的气相色谱测定

　　适用于安捷伦，岛津，赛默飞，瓦里安，布鲁克，PE，磐诺，东西电子，北分瑞利，科创，天瑞，天美，福立