多晶硅生产中还有大量的废气进行排放，其中不仅含有氯硅烷，还有大量的氢气和氯化氢气体，还原反应系统及多晶硅尾气回收系统排放的富含非金属杂质的氢气、精馏装置排放的尾气基本上未进行回收利用，大量的氢气和氯化氢气体不能得到良好的回收，回收不彻底。一般采用碱液淋洗吸收后排放放空，环保问题较为突出，氯硅烷、氢气和氯化氢损耗较大。

　　浩瀚色谱研发HH-1毛细管柱测定多晶硅尾气中氯化氢，柱效高，分离好，结果满意。

　　名称:毛细管柱

　　固定液:二甲基聚硅氧烷

　　规格:30m*0.53mm*1.5um

　　型号:HH-1

　　应用:T/CNIA 0016-2019多晶硅用回收氢气中氯化氢,氮气,氧气,总碳含量的气相色谱测定

　　适用于:安捷伦6890 ，7890,7820,8860,8890；岛津GC2014，GC-2010，GC-2030；赛默飞1310，瓦里安，布鲁克，PE，磐诺，天瑞，天美

　　In the production of polycrystalline silicon, there is still a large amount of exhaust gas emitted, which not only contains chlorosilane, but also a large amount of hydrogen and hydrogen chloride gases. The hydrogen gas rich in non-metallic impurities emitted from the reduction reaction system and polycrystalline silicon tail gas recovery system, as well as the tail gas emitted from the distillation unit, are basically not recycled and reused. A large amount of hydrogen and hydrogen chloride gases cannot be well recovered, and the recovery is not thorough. Generally, alkaline solution is used for washing and absorption before discharging and emptying, which poses a prominent environmental issue. Chlorosilane, hydrogen gas, and hydrogen chloride suffer from significant losses.

　　Haohan Chromatography developed HH-1 capillary column for the determination of hydrogen chloride in polycrystalline silicon exhaust gas, with high column efficiency, good separation, and satisfactory results.

　　Name: Capillary Column

　　Fixed Liquid: Dimethyl Polysiloxane

　　Specification: 30m * 0.53mm * 1.5um

　　Model: HH-1

　　Application: Gas Chromatography Determination of Hydrogen Chloride, Nitrogen, Oxygen, and Total Carbon Content in Recycled Hydrogen for Polycrystalline Silicon (T/CNIA 0016-2019)

　　Applicable to: Agilent 68907890782088608890; Shimadzu GC2014, GC-2010，GC-2030； Thermo Fisher 1310, Varian, Brooke, PE, Panno, Tianrui, Tianmei