用氢火焰离子化检测器的气相色谱仪进行测定,最后换算成总碳的含量。结果发现,高纯三氯氢硅中的甲基二氯硅烷、甲基三氯硅烷、二甲基二氯硅烷等可能的含碳物质在转化炉内均具有良好的转化率,转化率大于85%。样品中含碳量的测定结果之间重复性好,精密度较高,相对标准偏差均小于10%。方法简单、快捷,准确度高,能很好地满足高纯三氯氢硅样品中对含碳物质的质量控制要求。

　　名称:DC-550填充柱

　　规格:3m*1/8

　　使用温度:240°C

　　货号:20231123006

　　应用:三氯氢硅，四氯化硅等分离

　　Measure using a gas chromatograph with a hydrogen flame ionization detector and convert it to the total carbon content. The results showed that possible carbon containing substances such as methyldichlorosilane, methyltrichlorosilane, and dimethyldichlorosilane in high-purity trichlorosilane all had good conversion rates in the conversion furnace, with conversion rates exceeding 85%. The determination results of carbon content in the sample have good repeatability and high precision, with relative standard deviations less than 10%. The method is simple, fast, and has high accuracy, which can well meet the quality control requirements for carbon containing substances in high-purity trichlorosilane samples.

　　Name: DC-550 filled column

　　Specification: 3m * 1/8

　　Operating temperature: 240 ° C

　　Product number: 2023112306

　　Application: Separation of trichlorosilane, tetrachlorosilane, etc