.高纯电子级六氯乙硅烷是一种性能稳定、挥发性低的湿度敏感性的特种气体，在半导体行业有着较为广泛的应用。高纯电子级六氯乙硅烷的主要用于氧化硅膜、氮化硅膜等薄膜的制备，与传统的化学气相沉积法制备氧化硅膜、氮化硅膜相比，采用六氯乙硅烷制备的过程具有沉积温度低、沉积压力低、生产效率高的优点，且得到的氧化硅膜和氮化硅膜的密度、绝缘性、抗腐蚀性、兼容性都更好。

　　浩瀚色谱（山东）应用技术开发有限公司，研发气相色谱法测定电子特气 六氯乙硅烷的含量，面积归一法定量，结果满意。

　　名称:DC-550不锈钢填充柱

　　规格:3m*Φ3

　　*高使用温度:240°C

　　货号:20231119001

　　应用:YS/T 1434-2021六氯乙硅烷组分含量的测定 气相色谱法

　　GB/T 42720-2023电子特气 六氯乙硅烷

　　High purity electronic grade hexachloroethane is a special gas with stable performance, low volatility, and humidity sensitivity, which has a wide range of applications in the semiconductor industry. High purity electronic grade hexachloroethane is mainly used for the preparation of thin films such as silicon oxide films and silicon nitride films. Compared with traditional chemical vapor deposition methods for preparing silicon oxide films and silicon nitride films, the process of preparing hexachloroethane has the advantages of low deposition temperature, low deposition pressure, and high production efficiency. Moreover, the density, insulation, corrosion resistance, and compatibility of the obtained silicon oxide and silicon nitride films are better.

　　Haohan Chromatography (Shandong) Application Technology Development Co., Ltd. has developed a gas chromatography method to determine the content of electronic special gas hexachloroethane, and the area normalization method has been used for quantification, with satisfactory results.

　　Name: DC-550 stainless steel filled column

　　Specification: 3m* Φ three

　　*High operating temperature: 240 ° C

　　Article number: 20231119001

　　Application: YS/T 1434-2021 Determination of Hexachloroethane Component Content Gas Chromatography

　　GB/T 42720-2023 Electronic Special Gas Hexachloroethane