详细说明
BenchMark 250 offers is a compact general-purpose metrology system with all the features and capabilities of the larger VIEW Micro-Metrology Models,With travel of 300X 150X150 mm,the Benchmark can accommodate a wide range of part sizes,and is rugged enough to be located in either a Q/A lab an inspection station on the production floor.
the Benchmark 250 includes a precision compund X-Y stage, and VIEW exclusive dual magnification optics, An optional laser sensor adds unparalleled Z-axis measurement capability to this compact system.
The Benchmark 250 is well suited to measure many types of components, including moded plastic parts, machined parts, electronic assemblies, semicondutor packages,fiber optic components,disk media substrates,recording head die, or semiconductor wafers up to 150mm in diameter
| BenchMark 250 Specifications 6 |
XY Area Accuracy:E2=(1.8+6L/1000)um (E2=(1.0+6L/1000)um repuire high resolution scale option)
Z Linear Accuracy:E1=(2.0+5L/1000)um (E1=(1.2+5L/1000)um with TTL laser and 5X lens)
| English Units | Metric Units |
| Measuring Range | 12" X6"X6" | 300X150x150mm |
| Dimensions | 28.3" X30.5"X38.3" | 720X775X873mm |
| Load Capacity | 25kg |
| Stage Resolution | 0.5um |
| OPtics | Dual Magnification (Objective Lens X) |
| Low | 0.8 | 1.0 | 2.5 | 5.0 | 10.0 | 25.0 | |
| High | 3.2 | 4.0 | 10.0 | 20.0 | 40.0 | 100.0 | |
| Standard Objective Lens | 1X |
| Optional Objective Lenses | 0.8X,2.5X,5X |
| Illumination | LED Backlight,LED Coaxial Surface light |
| Optional Features | Multi-color Programable Ring Light (PRL) |
| Ronchi Grid Autofocus |
| TTL Laser | | |
| Rotary Index Table |